nitrogen trifluoride (Q251)

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A long-lived synthetic gas, used in semiconductor manufacturing, with a high global warming potential.
  • NF3
  • NFs
  • trifluoride
  • NF
Language Label Description Also known as
English
nitrogen trifluoride
A long-lived synthetic gas, used in semiconductor manufacturing, with a high global warming potential.
  • NF3
  • NFs
  • trifluoride
  • NF

Statements

Nitrogen trifluoride has an atmospheric lifetime of approximately 550 years. It's used in electronics manufacturing for etching, cleaning, and other processes due to its stability and ease of use